How advances in semiconductor fabrication equipment are being applied to the production of nano-scale microelectromechanical systems, or MEMS (Christopher Mims/Wall Street Journal) TECH REVIEW

Christopher Mims / Wall Street Journal:
How advances in semiconductor fabrication equipment are being applied to the production of nano-scale microelectromechanical systems, or MEMS  —  For years, engineers have made microchips ever smaller and more powerful.  Now they're applying the technology to a host of miniature marvels.

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